GENCOA - SPEEDFLO
Perfect your reactive processes with Speedflo, an advanced reactive feedback control system delivering improvements to deposition rates, coating properties and process reliability. Speedflo is designed around the demands of real processes and has been proven on hundreds of different industrial plasma-based deposition machines – each with varying demands.
PERFECT YOUR REACTIVE PROCESSES
Perfect your process
With two options available – offering a choice of 8 channels for Speedflo, or 3 channels for Speedflo Mini – Speedflo has the flexibility to benefit a wide range of reactive processes, from magnetron sputtering to PECVD deposition.
Speedflo auto-tune
Achieving high performance control of your system is a quick and easy process using Speedflo. A patented, state-of-the-art automatic controller tuning procedure provides optimum controller parameters for your process at the click of a button. The auto-tuning procedure is fast and effective – and works within any system or sensor configuration.
After performing an integrated system calibration and identification procedure, the auto-tuner instantly generates the optimum controller parameters for your process by using advanced inverse dynamics algorithms to analyse the collected data.
The whole procedure takes a couple of minutes and is perfectly suited to the demands of actual processes.
SENSORS
Speedflo and Speedflo Mini can each be configured with a combination of sensor options from a selection of available sensors:
• Target voltage (HIPIMS option available)
• PEM in-situ (HIPIMS option available)
• Spectrometer (not available for Speedflo Mini)
• PEM ex-situ (Penning)
• Lambda for O² only
SPEEDFLO
SIMULATOR
Replicate the Speedflo user interface using a tool that provides a dynamic simulation of the Speedflo system. Benefitting from Gencoa’s in-depth understanding of process control, the software simulates the effect of Speedflo features such as controller gains and calibration parameters, in addition to system characteristics such as gas delivery pipe length.
The simulator is a highly effective tool and can improve the system user's understanding of feedback control, as well as the operation of the Speedflo system
SPEEDFLO
AUTOTUNE
Achieving high performance control of your system is a quick and easy process using Speedflo. A patented, state-of-the-art automatic controller tuning procedure provides optimum controller parameters for your process at the click of a button. The auto-tuning procedure is fast and effective – and works within any system or sensor configuration.
After performing an integrated system calibration and identification procedure, the auto-tuner instantly generates the optimum controller parameters for your process by using advanced inverse dynamics algorithms to analyse the collected data.
The whole procedure takes a couple of minutes and is perfectly suited to the demands of actual processes.
SPEEDFLO TECHNOLOGY
Control algorithm
Speedflo utilizes a proprietary advanced PDF+ control algorithm that is capable of extremely fast and accurate feedback control. In addition to the PDF+ algorithm the Speedflo controller features a digital variable structure control law that is able to maintain fast-acting and stable control, even when the MFC becomes fully open or closed. This enables feedback control that is high performance, robust and reliable.
Multiple control channels
The Speedflo controller has up to eight fully featured and independent control channels. This allows for simultaneous feedback control of eight MFCs, with options to combine various sensors and duplicate control channels. This powerful capability is especially useful for large target areas where precise deposition uniformity must be achieved.
Advanced user interface
A highly developed software interface includes many powerful functions to allow different methods of configuring the process control and combating difficult control situations. All of the software functions can be seamlessly incorporated into an existing PLC system.
